A road for macroporous silicon stabilization by ultrathin ALD TiO 2 coating

Macroporous silicon films have great potential for a plethora of applications in optoelectronics and microelectronics. However, such layers are too electrically and chemically unstable to be used in fuel cells, supercapacitors or any devices requiring the use of an electrolyte. This is due to their...

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Veröffentlicht in:	Materials advances 2024-11, Vol.5 (23), p.9270-9278
Hauptverfasser:	Al Chimali, Bachar, Carrasco, Irene, Defforge, Thomas, Dailleau, Romain, Monnier, Lisa, Baishya, Kaushik, Macak, Jan M., Gautier, Gael, Le Borgne, Brice
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Micro and nanotechnologies Microelectronics
Online-Zugang:	Volltext
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