Classification of the acquisition conditions driving the accuracy of strain measurements during in situ DIC with scanning electron microscope

Performing in situ scanning electron microscope (SEM) tests is an interesting way to visualise strain heterogeneities under mechanical loading. An essential step before performing the tests is to define the acquisition conditions. The aim of this paper is to propose a classification of the acquisition conditions that are most important for the accuracy of strain measurements using digital image correlation (DIC) in in situ SEM tests. More than 200 image pairs were acquired using a field emission gun SEM. The influence of different acquisition conditions was investigated: acceleration voltage, probe current, working distance, magnification, number of integrated images, image resolution, integration and number of integrated images, scan speed, contrast, brightness and exposure time of the sample in a given area. The methodology implemented in this work is an interesting tool for detecting scan line shift, drift distortion, spatial distortion and rastering artefacts. It allows the optimization of SEM acquisition conditions for strain measurements. Finally, optimal acquisition conditions for in situ testing are proposed and used to perform a tensile test on pure copper. The main factors highlighted include the size of the subset used in the DIC, the beam stabilisation time before image acquisition and the size of the images, which play a significant role in the results. It is recommended to apply the methodology to each device to optimise the acquisition conditions.