Influence of the intermediate oxidation layer on the characteristics of lead zirconate titanate thin films with aluminium substrate

This paper presents a flexible piezoelectric device that has been realized by depositing lead zirconate titanate (PZT) thin films by chemical solution deposition (CSD) on a commercial aluminum foil as a substrate. The thermal treatment required for the crystallization of the PZT thin films leads to...

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Veröffentlicht in:Thin solid films 2023-04, Vol.770, p.139761, Article 139761
Hauptverfasser: Scornec, Julien Le, Seveno, Raynald, Dufay, Thibault, Guiffard, Benoit
Format: Artikel
Sprache:eng
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