High Figure-of-Merit in Al-Doped ZnO Thin Films Grown by ALD through the Al Content Adjustment

The development of transparent conductive materials is of great interest for a wide variety of semiconducting devices in the fields of optoelectronics and photovoltaics. Here, we optimize the growth and properties of aluminum-doped ZnO (AZO) thin films as an eco-friendly transparent electrode by usi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Materialia 2023-09, Vol.31, p.101863, Article 101863
Hauptverfasser:	Bui, Quang Chieu, Consonni, Vincent, Boubenia, Sarah, Gay, Guillaume, Perret, Corinne, Zeghouane, Mohammed, Labau, Sebastien, Roussel, Hervé, Mescot, Xavier, Ardila, Gustavo, Salem, Bassem
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic Layer Deposition AZO Chemical Sciences Condensed Matter Material chemistry Materials Science Nanostructures Physics Transparent conductive oxide ZnO
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!