3D micro-structures for rarefied gas flow applications manufactured via two-photon-polymerization

In this work, the two-photon-polymerization (TPP) fabrication technique was employed to manufacture three-dimensional (3D) micro-structures suitable for confined rarefied gas flows. Four different micro-tubes of simple geometry have been tested in vacuum conditions. The geometry of the micro-tubes w...

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Veröffentlicht in:	Vacuum 2023-05, Vol.211, p.111915, Article 111915
Hauptverfasser:	Zhang, Dingdong, López-Quesada, Guillermo, Bergdolt, Samuel, Hengsbach, Stefan, Bade, Klaus, Colin, Stéphane, Rojas-Cárdenas, Marcos
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Microfabrication Microfluidics Rarefied gas flows Two-photon-polymerization
Online-Zugang:	Volltext
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