Low-stress fabrication of 3D polymer free standing structures using lamination of photosensitive films

Free-standing microstructures such as cantilevers, membranes or microchannels are building blocks of microfluidic systems and MEMS. As a complement to silicon, the large family of polymers offers many opportunities for micro and nanotechnologies. Their low temperature processing and the planarizing...

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Veröffentlicht in:	Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2008-08, Vol.14 (8), p.1205-1214
Hauptverfasser:	Abgrall, Patrick, Charlot, Samuel, Fulcrand, Remy, Paul, Lefillastre, Boukabache, Ali, Gué, Anne-Marie
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Biological and medical sciences Biosensors Biotechnology Electronics and Microelectronics Engineering Engineering Sciences Exact sciences and technology Fluid dynamics Fluidics Fundamental and applied biological sciences. Psychology Fundamental areas of phenomenology (including applications) Instrumentation Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical Engineering Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Methods. Procedures. Technologies Micro and nanotechnologies Microelectronics Micromechanical devices and systems Nanotechnology Physics Precision engineering, watch making Technical Paper Various methods and equipments
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