Soft polymerization of hexamethyldisiloxane by coupling pulsed direct‐liquid injections with dielectric barrier discharge

This work examines the combination of pulsed direct‐liquid injections with dielectric barrier discharge at atmospheric pressure for the deposition of organosilicon coatings using hexamethyldisiloxane (HMDSO) as the precursor and nitrogen as the carrier gas. In such conditions, deposition relies on t...

Ausführliche Beschreibung