Detection Limit of Phosphorus in Diamond by High Mass Resolution Secondary‐Ion Mass Spectrometry

In diamond, secondary‐ion mass spectrometry (SIMS) is usually performed in order to detect and measure the depth distribution of impurities. The SIMS measurements are then performed using parameters allowing high sensitivities. In the classical configuration for diamond analysis, the mass resolution...

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Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2023-02, Vol.220 (4), p.n/a
Hauptverfasser:	Pinault-Thaury, Marie-Amandine, Jomard, François
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed Matter depth profiles detection limits Diamonds high mass resolution ion analyses Mass spectrometry Materials Science Molecular ions Parameter sensitivity Phosphorus Physics secondary-ion mass spectroscopy
Online-Zugang:	Volltext
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