Velocity distribution function of sputtered Cu atoms obtained by time resolved optical absorption spectroscopy

A new method based on time resolved optical absorption spectroscopy is proposed to determine the velocity distribution function of sputtered Cu atoms in a magnetron plasma discharge. The method consists of applying a short pulse of 1.5 μ s and of recording time variations in copper atom density in...

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Veröffentlicht in:	Review of scientific instruments 2010-01, Vol.81 (1), p.013102-013102-5
Hauptverfasser:	Kang, Namjun, Oh, Soo-ghee, Gaboriau, Freddy, Ricard, André
Format:	Artikel
Sprache:	eng
Schlagworte:	ABSORPTION SPECTROSCOPY CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY COPPER DENSITY DISTRIBUTION FUNCTIONS ELECTRIC DISCHARGES Engineering Sciences INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY MAGNETRONS PLASMA PLASMA DIAGNOSTICS RADIAL VELOCITY SPUTTERING SURFACES TIME RESOLUTION WALL EFFECTS
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