Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor
A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thick...
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| Veröffentlicht in: | Nano letters 2022-04, Vol.22 (8), p.3196-3203 |
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| container_title | Nano letters |
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| creator | Mistry, Kissan Nguyen, Viet Huong Arabi, Mohamed Ibrahim, Khaled H Asgarimoghaddam, Hatameh Yavuz, Mustafa Muñoz-Rojas, David Abdel-Rahman, Eihab Musselman, Kevin P |
| description | A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. Furthermore, the ZnO cantilever sensor is self-actuated in air, an advantageous detection mode that enables simpler and lower-power-consumption sensors. |
| doi_str_mv | 10.1021/acs.nanolett.1c04378 |
| format | Article |
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An open-air spatial atomic layer deposition technique is used to deposit the ZnO layer to achieve a ∼200 nm thickness, an order of magnitude lower than the thicknesses of conventional microcantilever sensors. The reduction in the number of layers, in the cantilever dimensions, and its overall lower mass lead to an ultrahigh sensitivity, demonstrated by detection of low humidity levels. A maximum sensitivity of 23649 ppm/% RH at 5.8% RH is observed, which is several orders of magnitude larger than those reported for other resonant humidity sensors. Furthermore, the ZnO cantilever sensor is self-actuated in air, an advantageous detection mode that enables simpler and lower-power-consumption sensors.</description><subject>Chemical Sciences</subject><subject>Humidity</subject><subject>Material chemistry</subject><subject>Zinc Oxide - chemistry</subject><issn>1530-6984</issn><issn>1530-6992</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><sourceid>EIF</sourceid><recordid>eNp9kE1PwjAcxhujEUS_gTE76mH479p17ZEQFRMMCerFS1PWTkrGhmtH5NtbMuDoqU-a56X9IXSLYYghwY8qd8NKVXVpvB_iHCjJ-Bnq45RAzIRIzk-a0x66cm4FAIKkcIl6JKVAGbA-mk_s97LcRe-mctbbrQmqLOJR7lvljY6-bJVHs1-rTTQ3rg6DPnqzeVPnQdnSbE0TTdq11dZ3JXVzjS4KVTpzczgH6PP56WM8iaezl9fxaBqr8FIfK5VQsdCaa4qJNphxjlmmCyUE5UAzAhwypgu8SLhWWouMZgUAI5AnBckWZIAeut6lKuWmsWvV7GStrJyMpnJ_B4SlDPNsi4P3vvNumvqnNc7LtXW5KUtVmbp1MmFUpCJJwuwA0c4aPulcY4pTNwa5Jy8DeXkkLw_kQ-zusNAu1kafQkfUwQCdYR9f1W1TBTj_d_4BxNuSUA</recordid><startdate>20220427</startdate><enddate>20220427</enddate><creator>Mistry, Kissan</creator><creator>Nguyen, Viet Huong</creator><creator>Arabi, Mohamed</creator><creator>Ibrahim, Khaled H</creator><creator>Asgarimoghaddam, Hatameh</creator><creator>Yavuz, Mustafa</creator><creator>Muñoz-Rojas, David</creator><creator>Abdel-Rahman, Eihab</creator><creator>Musselman, Kevin P</creator><general>American Chemical Society</general><scope>CGR</scope><scope>CUY</scope><scope>CVF</scope><scope>ECM</scope><scope>EIF</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>1XC</scope><orcidid>https://orcid.org/0000-0002-9752-0015</orcidid><orcidid>https://orcid.org/0000-0001-9593-6896</orcidid><orcidid>https://orcid.org/0000-0001-6651-2699</orcidid><orcidid>https://orcid.org/0000-0003-1234-0814</orcidid></search><sort><creationdate>20220427</creationdate><title>Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor</title><author>Mistry, Kissan ; Nguyen, Viet Huong ; Arabi, Mohamed ; Ibrahim, Khaled H ; Asgarimoghaddam, Hatameh ; Yavuz, Mustafa ; Muñoz-Rojas, David ; Abdel-Rahman, Eihab ; Musselman, Kevin P</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a378t-aa249bdd8d413de1688167dfa9948047308076df1b28dadd9747f00630c2f37b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Chemical Sciences</topic><topic>Humidity</topic><topic>Material chemistry</topic><topic>Zinc Oxide - chemistry</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Mistry, Kissan</creatorcontrib><creatorcontrib>Nguyen, Viet Huong</creatorcontrib><creatorcontrib>Arabi, Mohamed</creatorcontrib><creatorcontrib>Ibrahim, Khaled H</creatorcontrib><creatorcontrib>Asgarimoghaddam, Hatameh</creatorcontrib><creatorcontrib>Yavuz, Mustafa</creatorcontrib><creatorcontrib>Muñoz-Rojas, David</creatorcontrib><creatorcontrib>Abdel-Rahman, Eihab</creatorcontrib><creatorcontrib>Musselman, Kevin P</creatorcontrib><collection>Medline</collection><collection>MEDLINE</collection><collection>MEDLINE (Ovid)</collection><collection>MEDLINE</collection><collection>MEDLINE</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>Nano letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Mistry, Kissan</au><au>Nguyen, Viet Huong</au><au>Arabi, Mohamed</au><au>Ibrahim, Khaled H</au><au>Asgarimoghaddam, Hatameh</au><au>Yavuz, Mustafa</au><au>Muñoz-Rojas, David</au><au>Abdel-Rahman, Eihab</au><au>Musselman, Kevin P</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor</atitle><jtitle>Nano letters</jtitle><addtitle>Nano Lett</addtitle><date>2022-04-27</date><risdate>2022</risdate><volume>22</volume><issue>8</issue><spage>3196</spage><epage>3203</epage><pages>3196-3203</pages><issn>1530-6984</issn><eissn>1530-6992</eissn><abstract>A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. 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| source | MEDLINE; ACS Publications |
| subjects | Chemical Sciences Humidity Material chemistry Zinc Oxide - chemistry |
| title | Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor |
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