High quality MPACVD diamond single crystal growth: high microwave power density regime

The growth of monocrystalline diamond films of electronic quality and large thickness ( > few hundreds of microns) is an important issue in particular for high-power electronics. In this paper, we will describe the different key parameters necessary to reach this objective. First, we will examine...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2007-10, Vol.40 (20), p.6175-6188
Hauptverfasser:	Achard, J, Silva, F, Tallaire, A, Bonnin, X, Lombardi, G, Hassouni, K, Gicquel, A
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences
Online-Zugang:	Volltext
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