SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components

This work presents a "half-etch" horizontal slot waveguide design based on SiN, where only the upper SiN layer is etched to form a strip that confines the mode laterally. The numerical modeling, fabrication, and characterization of passive waveguiding components are described. This novel s...

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Veröffentlicht in:	Optics express 2022-01, Vol.30 (3), p.4202-4214
Hauptverfasser:	Kempf, Eva, Romeo, Pedro Rojo, Gassenq, Alban, Taute, Arnaud, Chantraine, Paul, John, Jimmy, Belarouci, Ali, Monfray, Stephane, Boeuf, Frederic, Charette, Paul G, Orobtchouk, Regis
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical Sciences Engineering Sciences Physics
Online-Zugang:	Volltext
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