Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition
Various reactive gas phase treatments have been investigated as surface functionalization dry processes with the goal to improve the wettability of parylene C films, keeping good optical properties in the visible range. The films were grown on different substrates by chemical vapor deposition with t...
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| Veröffentlicht in: | Thin solid films 2010, Vol.518 (6), p.1675-1681 |
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| container_title | Thin solid films |
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| creator | Santucci, Virginie Maury, Francis Senocq, François |
| description | Various reactive gas phase treatments have been investigated as surface functionalization dry processes with the goal to improve the wettability of parylene C films, keeping good optical properties in the visible range. The films were grown on different substrates by chemical vapor deposition with thicknesses ranging from 300 to 1630
nm. The polymer surface was treated under ultra violet (UV) irradiation at 254
nm in reactive atmospheres including He, H
2O, H
2O
2, O
2 and ambient air. The UV/O
2 treatment is the most efficient since the water contact angle decreases from 100° to 6° while the transmittance is maintained at 90% in the visible wavelengths. Furthermore it exhibits long life stability. The functionalization mechanism is discussed in relation with previous reports. |
| doi_str_mv | 10.1016/j.tsf.2009.11.064 |
| format | Article |
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nm. The polymer surface was treated under ultra violet (UV) irradiation at 254
nm in reactive atmospheres including He, H
2O, H
2O
2, O
2 and ambient air. The UV/O
2 treatment is the most efficient since the water contact angle decreases from 100° to 6° while the transmittance is maintained at 90% in the visible wavelengths. Furthermore it exhibits long life stability. The functionalization mechanism is discussed in relation with previous reports.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/j.tsf.2009.11.064</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Aging ; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Engineering Sciences ; Exact sciences and technology ; Materials ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Optical coatings ; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation ; Optical properties of specific thin films ; Parylene films ; Physical radiation effects, radiation damage ; Physics ; Solid-fluid interfaces ; Structure of solids and liquids; crystallography ; Surface composition ; Surface functionalization ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; UV irradiation ; Wetting</subject><ispartof>Thin solid films, 2010, Vol.518 (6), p.1675-1681</ispartof><rights>2009 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c404t-c2708dffa7a367400f038bbc1c964b0906432bad23b58e79869223f1a15d60073</citedby><cites>FETCH-LOGICAL-c404t-c2708dffa7a367400f038bbc1c964b0906432bad23b58e79869223f1a15d60073</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0040609009019580$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>230,314,776,780,881,3537,4010,27900,27901,27902,65306</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=22472437$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://hal.science/hal-03557604$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Santucci, Virginie</creatorcontrib><creatorcontrib>Maury, Francis</creatorcontrib><creatorcontrib>Senocq, François</creatorcontrib><title>Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition</title><title>Thin solid films</title><description>Various reactive gas phase treatments have been investigated as surface functionalization dry processes with the goal to improve the wettability of parylene C films, keeping good optical properties in the visible range. The films were grown on different substrates by chemical vapor deposition with thicknesses ranging from 300 to 1630
nm. The polymer surface was treated under ultra violet (UV) irradiation at 254
nm in reactive atmospheres including He, H
2O, H
2O
2, O
2 and ambient air. The UV/O
2 treatment is the most efficient since the water contact angle decreases from 100° to 6° while the transmittance is maintained at 90% in the visible wavelengths. Furthermore it exhibits long life stability. The functionalization mechanism is discussed in relation with previous reports.</description><subject>Aging</subject><subject>Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Engineering Sciences</subject><subject>Exact sciences and technology</subject><subject>Materials</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Optical coatings</subject><subject>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</subject><subject>Optical properties of specific thin films</subject><subject>Parylene films</subject><subject>Physical radiation effects, radiation damage</subject><subject>Physics</subject><subject>Solid-fluid interfaces</subject><subject>Structure of solids and liquids; crystallography</subject><subject>Surface composition</subject><subject>Surface functionalization</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>UV irradiation</subject><subject>Wetting</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNp9UE1v1DAQtRBILAs_gJsvHDgkHX-snYhTVRW20kq9AFdr4tisV9k4srOpWon_TkKqHnua0cx78-Y9Qj4zKBkwdXUqx-xLDlCXjJWg5BuyYZWuC64Fe0s2ABIKBTW8Jx9yPgEA41xsyN_fOMREhyNmR_MlebSO-ktvxxB77MITLg299K1L9NKNCekUYudGijNkWrfR0wHTY-d6R8dj6KkP3TnTPyk-9LR5pPbozsFiR6f_Yq0bYg4L8yN557HL7tNz3ZJf329_3uyLw_2Pu5vrQ2ElyLGwXEPVeo8ahdISwIOomsYyWyvZzKaUFLzBlotmVzldV6qezXmGbNcqAC225Ot694idGVI4z9-aiMHsrw9mmYHY7bQCObEZy1asTTHn5PwLgYFZsjYnM2dtlqwNY2YR35IvK2fAPPv0CXsb8guRc6m5FMsf31acm81OwSWTbXC9dW1Izo6mjeEVlX-5PpXh</recordid><startdate>2010</startdate><enddate>2010</enddate><creator>Santucci, Virginie</creator><creator>Maury, Francis</creator><creator>Senocq, François</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope><scope>VOOES</scope></search><sort><creationdate>2010</creationdate><title>Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition</title><author>Santucci, Virginie ; 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crystallography</topic><topic>Surface composition</topic><topic>Surface functionalization</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>UV irradiation</topic><topic>Wetting</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Santucci, Virginie</creatorcontrib><creatorcontrib>Maury, Francis</creatorcontrib><creatorcontrib>Senocq, François</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Santucci, Virginie</au><au>Maury, Francis</au><au>Senocq, François</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition</atitle><jtitle>Thin solid films</jtitle><date>2010</date><risdate>2010</risdate><volume>518</volume><issue>6</issue><spage>1675</spage><epage>1681</epage><pages>1675-1681</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>Various reactive gas phase treatments have been investigated as surface functionalization dry processes with the goal to improve the wettability of parylene C films, keeping good optical properties in the visible range. The films were grown on different substrates by chemical vapor deposition with thicknesses ranging from 300 to 1630
nm. The polymer surface was treated under ultra violet (UV) irradiation at 254
nm in reactive atmospheres including He, H
2O, H
2O
2, O
2 and ambient air. The UV/O
2 treatment is the most efficient since the water contact angle decreases from 100° to 6° while the transmittance is maintained at 90% in the visible wavelengths. Furthermore it exhibits long life stability. The functionalization mechanism is discussed in relation with previous reports.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.tsf.2009.11.064</doi><tpages>7</tpages><oa>free_for_read</oa></addata></record> |
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| source | Elsevier ScienceDirect Journals |
| subjects | Aging Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Engineering Sciences Exact sciences and technology Materials Materials science Methods of deposition of films and coatings film growth and epitaxy Optical coatings Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Parylene films Physical radiation effects, radiation damage Physics Solid-fluid interfaces Structure of solids and liquids crystallography Surface composition Surface functionalization Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) UV irradiation Wetting |
| title | Vapor phase surface functionalization under ultra violet activation of parylene thin films grown by chemical vapor deposition |
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