Investigation of interfacial dead layers parameters in Au/Ba0.85Sr0.15TiO3/Pt capacitor devices

New ferroelectric Ba0.85Sr0.15TiO3 (BST) thin films are deposited with different thicknesses (50,100, 200,280 and 400 nm) on silicon platinized substrates using spin coater machine and their morphological and structural properties are investigated. The results show that the films are well crystalliz...

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Veröffentlicht in:	Journal of alloys and compounds 2020-06, Vol.826, p.154048, Article 154048
Hauptverfasser:	Selmi, A., Mascot, M., Jomni, F., Carru, J.-C.
Format:	Artikel
Sprache:	eng
Schlagworte:	BaSrTiO3 Capacitors Chemical Sciences Crystallization Dead layer Dielectric properties Dielectrics Ferroelectricity Film thickness Gold Interfaces Investigations Leakage current Permittivity Perovskites Platinum Silicon substrates Sol gel Thickness measurement Thin film Thin films
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