Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X‐ray photoelectron spectrometers (XPS)

ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres revises ISO 18516:2006 Surface chemical analysis—Auger electron spectroscopy and X‐ray photoelectron spectroscopy—Determination of lateral reso...

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Veröffentlicht in:	Surface and interface analysis 2022-04, Vol.54 (4), p.320-327
Hauptverfasser:	Unger, Wolfgang E. S., Senoner, Mathias, Stockmann, Jörg M., Fernandez, Vincent, Fairley, Neal, Passiu, Cristiana, Spencer, Nicholas D., Rossi, Antonella
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Chemical analysis Condensed Matter Flow control grating method Imaging imaging AES imaging SIMS imaging XPS Laboratories lateral resolution Line spread function Materials Science Methods narrow line method noise in image Parameters Photoelectron spectroscopy Photoelectrons Physics Resolution resolution criterion Sharpness Slopes Spectrometers Spectrum analysis straight edge method
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