Mixed stepping/scanning mode control of stick-slip SEM-integrated nano-robotic systems

•Comprehensive modeling of Piezoelectric Stick-Slip (PSS) actuators to accurately describe both scanning and stepping operating modes.•A multi-criteria robust control strategy in scanning mode ensures positioning with motion range from few nanometers to few micrometers, and nanometer resolution.•It...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2019-01, Vol.285, p.258-268
Hauptverfasser:	Oubellil, R., Voda, A., Boudaoud, M., Régnier, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Automatic Automatic control Automatic Control Engineering Closed loop systems Computer Science Control stability Degrees of freedom Engineering Sciences Laboratories Motion control Piezoelectricity Proportional control Robotics Scanning electron microscopy Sensors Slip Studies
Online-Zugang:	Volltext
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