Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening
Lithium niobate's use in integrated optics is somewhat hampered by the lack of a capability to create low loss waveguides with strong lateral index confinement. Thin film single crystal lithium niobate is a promising platform for future applications in integrated optics due to the availability...
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| Veröffentlicht in: | Optics express 2018-02, Vol.26 (4), p.4421-4430 |
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| container_title | Optics express |
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| creator | Siew, Shawn Yohanes Cheung, Eric Jun Hao Liang, Haidong Bettiol, Andrew Toyoda, Noriaki Alshehri, Bandar Dogheche, Elhadj Danner, Aaron J |
| description | Lithium niobate's use in integrated optics is somewhat hampered by the lack of a capability to create low loss waveguides with strong lateral index confinement. Thin film single crystal lithium niobate is a promising platform for future applications in integrated optics due to the availability of a strong electro-optic effect in this material coupled with the possibility of strong vertical index confinement. However, sidewalls of etched waveguides are typically rough in most etching procedures, exacerbating propagation losses. In this paper, we propose a fabrication method that creates significantly smoother ridge waveguides. This involves argon ion milling and subsequent gas clustered ion beam smoothening. We have fabricated and characterized ultra-low loss waveguides with this technique, with propagation losses as low as 0.3 dB/cm at 1.55 µm. |
| doi_str_mv | 10.1364/oe.26.004421 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 1094-4087 |
| ispartof | Optics express, 2018-02, Vol.26 (4), p.4421-4430 |
| issn | 1094-4087 1094-4087 |
| language | eng |
| recordid | cdi_hal_primary_oai_HAL_hal_03183505v1 |
| source | DOAJ Directory of Open Access Journals; EZB-FREE-00999 freely available EZB journals; Alma/SFX Local Collection |
| subjects | Engineering Sciences Optics Photonic |
| title | Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening |
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