Oxygen effect on structural and optical properties of zinc oxide
This article deals with an investigation of the effect of oxygen content on optical and structural properties of ZnO films. Zinc oxide films were deposited with the DC reactive magnetron sputtering process on Si(100) and glass substrates. ZnO films were elaborated at different oxygen flow rates from...
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Veröffentlicht in: | Surface engineering 2019-06, Vol.35 (6), p.520-526 |
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creator | Radjehi, Lamia Djelloul, Abdelkader Lamri, Salim Slim, Mohamed Fares Rahim, Mourad |
description | This article deals with an investigation of the effect of oxygen content on optical and structural properties of ZnO films. Zinc oxide films were deposited with the DC reactive magnetron sputtering process on Si(100) and glass substrates. ZnO films were elaborated at different oxygen flow rates from (O
2
) 12 to 35 sccm. The evolution of optical and structural properties as a function of O
2
was investigated by X-ray diffraction, Profilometer, Field Emission Scanning Electron Microscopy (FESEM) and ultraviolet-visible. By increasing O
2
, the crystallite size increases from 20 to 27 nm, which leads to an enlargement in the ZnO band gap from 3.18 to 3.30 eV. At 30 sccm of O
2
, the films present a significant improvement in the band gap (3.30 eV). The results reveal that with increasing O
2
, all films show a high crystallinity in the wurtzite phase and present a (002)ZnO preferential orientation along the c-axis. ZnO exhibited a good self-texture. |
doi_str_mv | 10.1080/02670844.2018.1515842 |
format | Article |
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2
) 12 to 35 sccm. The evolution of optical and structural properties as a function of O
2
was investigated by X-ray diffraction, Profilometer, Field Emission Scanning Electron Microscopy (FESEM) and ultraviolet-visible. By increasing O
2
, the crystallite size increases from 20 to 27 nm, which leads to an enlargement in the ZnO band gap from 3.18 to 3.30 eV. At 30 sccm of O
2
, the films present a significant improvement in the band gap (3.30 eV). The results reveal that with increasing O
2
, all films show a high crystallinity in the wurtzite phase and present a (002)ZnO preferential orientation along the c-axis. ZnO exhibited a good self-texture.</description><identifier>ISSN: 0267-0844</identifier><identifier>EISSN: 1743-2944</identifier><identifier>DOI: 10.1080/02670844.2018.1515842</identifier><language>eng</language><publisher>London, England: Taylor & Francis</publisher><subject>bad gap ; crystallite size ; Engineering Sciences ; self-texture ; transmittance ; ZnO</subject><ispartof>Surface engineering, 2019-06, Vol.35 (6), p.520-526</ispartof><rights>2018 Institute of Materials, Minerals and Mining Published by Taylor & Francis on behalf of the Institute 2018</rights><rights>2018 Institute of Materials, Minerals and Mining Published by Taylor & Francis on behalf of the Institute</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c387t-58fcad872fc11a7cabde45b43aed1e477549392f197099c2370680a77f789c13</citedby><cites>FETCH-LOGICAL-c387t-58fcad872fc11a7cabde45b43aed1e477549392f197099c2370680a77f789c13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://journals.sagepub.com/doi/pdf/10.1080/02670844.2018.1515842$$EPDF$$P50$$Gsage$$H</linktopdf><linktohtml>$$Uhttps://journals.sagepub.com/doi/10.1080/02670844.2018.1515842$$EHTML$$P50$$Gsage$$H</linktohtml><link.rule.ids>230,314,780,784,885,21819,27924,27925,43621,43622</link.rule.ids><backlink>$$Uhttps://hal.science/hal-03124227$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Radjehi, Lamia</creatorcontrib><creatorcontrib>Djelloul, Abdelkader</creatorcontrib><creatorcontrib>Lamri, Salim</creatorcontrib><creatorcontrib>Slim, Mohamed Fares</creatorcontrib><creatorcontrib>Rahim, Mourad</creatorcontrib><title>Oxygen effect on structural and optical properties of zinc oxide</title><title>Surface engineering</title><description>This article deals with an investigation of the effect of oxygen content on optical and structural properties of ZnO films. Zinc oxide films were deposited with the DC reactive magnetron sputtering process on Si(100) and glass substrates. ZnO films were elaborated at different oxygen flow rates from (O
2
) 12 to 35 sccm. The evolution of optical and structural properties as a function of O
2
was investigated by X-ray diffraction, Profilometer, Field Emission Scanning Electron Microscopy (FESEM) and ultraviolet-visible. By increasing O
2
, the crystallite size increases from 20 to 27 nm, which leads to an enlargement in the ZnO band gap from 3.18 to 3.30 eV. At 30 sccm of O
2
, the films present a significant improvement in the band gap (3.30 eV). The results reveal that with increasing O
2
, all films show a high crystallinity in the wurtzite phase and present a (002)ZnO preferential orientation along the c-axis. ZnO exhibited a good self-texture.</description><subject>bad gap</subject><subject>crystallite size</subject><subject>Engineering Sciences</subject><subject>self-texture</subject><subject>transmittance</subject><subject>ZnO</subject><issn>0267-0844</issn><issn>1743-2944</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNqFkE1PAjEQhhujiYj-BJNePSz2a2n3BiEKJiRcuDdDt8WSZbtpFwV_vWwWPeppJpPneZN5EXqkZESJIs-EjSVRQowYoWpEc5orwa7QgErBM1YIcY0GHZN10C26S2lHCKNS5QM0WR1PW1tj65w1LQ41Tm08mPYQocJQlzg0rTfnvYmhsbH1NuHg8JevDQ5HX9p7dOOgSvbhModo_fqyni2y5Wr-NpsuM8OVbLNcOQOlkswZSkEa2JRW5BvBwZbUCilzUfCCOVpIUhSGcUnGioCUTqrCUD5ET33sO1S6iX4P8aQDeL2YLnV3I5wywZj86Ni8Z00MKUXrfgVKdNeY_mlMd43pS2Nnj_Vegq3Vu3CI9fmjf6VJL_nahbiHzxCrUrdwqkJ0EWrjk-Z_R3wDfWp_vg</recordid><startdate>20190603</startdate><enddate>20190603</enddate><creator>Radjehi, Lamia</creator><creator>Djelloul, Abdelkader</creator><creator>Lamri, Salim</creator><creator>Slim, Mohamed Fares</creator><creator>Rahim, Mourad</creator><general>Taylor & Francis</general><general>SAGE Publications</general><general>Maney Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>1XC</scope></search><sort><creationdate>20190603</creationdate><title>Oxygen effect on structural and optical properties of zinc oxide</title><author>Radjehi, Lamia ; Djelloul, Abdelkader ; Lamri, Salim ; Slim, Mohamed Fares ; Rahim, Mourad</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c387t-58fcad872fc11a7cabde45b43aed1e477549392f197099c2370680a77f789c13</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>bad gap</topic><topic>crystallite size</topic><topic>Engineering Sciences</topic><topic>self-texture</topic><topic>transmittance</topic><topic>ZnO</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Radjehi, Lamia</creatorcontrib><creatorcontrib>Djelloul, Abdelkader</creatorcontrib><creatorcontrib>Lamri, Salim</creatorcontrib><creatorcontrib>Slim, Mohamed Fares</creatorcontrib><creatorcontrib>Rahim, Mourad</creatorcontrib><collection>CrossRef</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>Surface engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Radjehi, Lamia</au><au>Djelloul, Abdelkader</au><au>Lamri, Salim</au><au>Slim, Mohamed Fares</au><au>Rahim, Mourad</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Oxygen effect on structural and optical properties of zinc oxide</atitle><jtitle>Surface engineering</jtitle><date>2019-06-03</date><risdate>2019</risdate><volume>35</volume><issue>6</issue><spage>520</spage><epage>526</epage><pages>520-526</pages><issn>0267-0844</issn><eissn>1743-2944</eissn><abstract>This article deals with an investigation of the effect of oxygen content on optical and structural properties of ZnO films. Zinc oxide films were deposited with the DC reactive magnetron sputtering process on Si(100) and glass substrates. ZnO films were elaborated at different oxygen flow rates from (O
2
) 12 to 35 sccm. The evolution of optical and structural properties as a function of O
2
was investigated by X-ray diffraction, Profilometer, Field Emission Scanning Electron Microscopy (FESEM) and ultraviolet-visible. By increasing O
2
, the crystallite size increases from 20 to 27 nm, which leads to an enlargement in the ZnO band gap from 3.18 to 3.30 eV. At 30 sccm of O
2
, the films present a significant improvement in the band gap (3.30 eV). The results reveal that with increasing O
2
, all films show a high crystallinity in the wurtzite phase and present a (002)ZnO preferential orientation along the c-axis. ZnO exhibited a good self-texture.</abstract><cop>London, England</cop><pub>Taylor & Francis</pub><doi>10.1080/02670844.2018.1515842</doi><tpages>7</tpages></addata></record> |
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language | eng |
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source | SAGE Complete A-Z List |
subjects | bad gap crystallite size Engineering Sciences self-texture transmittance ZnO |
title | Oxygen effect on structural and optical properties of zinc oxide |
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