Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures

Silica and silica-based materials with tunable functionalities are frequently encountered in low-k material applications, porous membranes, and microelectonic devices. In the present study, an innovative O2/O3 assisted CVD process for the deposition of such films at moderate temperature is presented...

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