Electro-thermal and optical characterization of an uncooled suspended bolometer based on an epitaxial La 0.7 Sr 0.3 MnO 3 film grown on CaTiO 3 /Si

The electro-thermal and optical properties of a bolometer based on an La 0.7 Sr 0.3 MnO 3 ( LSMO) thin film with a detection area of 100 × 100 µ m 2 are presented. The LSMO thin film was epitaxially grown on CaTiO 3 /Si and patterned using a two-step etching process of ion-beam etching in argon and...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2021-02, Vol.54 (5), p.55301
Hauptverfasser:	Nascimento, V M, Méchin, L, Liu, S, Aryan, A, Adamo, C, Schlom, D G, Guillet, B
Format:	Artikel
Sprache:	eng
Schlagworte:	Electronics Engineering Sciences
Online-Zugang:	Volltext
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