Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors

Extracting simultaneously multimodal nanoscale specimen information, by an integrated microscopy technology, is in the focus of this report. The combination of multiple imaging techniques allows for obtaining complementary and often unique datasets of samples under test. An instrumental setup operat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2018-03, Vol.36 (2)
Hauptverfasser:	Haenssler, Olaf C., Fatikow, Sergej, Theron, Didier
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Micro and nanotechnologies Microelectronics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!