Synthesis of 3-dimensional periodic nanostructures in an interference field of UV laser light
In 2000, Campbell et al. (Nature 404:53, 2000 ) have shown that three-dimensional periodic nanostructures can be obtained from UV laser interference irradiation of photoresist for 6 nanosecond single pulse. We have developed a similar experiment for photolytic gas phase decomposition and for photopa...
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| Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 2008-10, Vol.93 (1), p.105-110 |
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| creator | Salaün, M. Audier, M. Duneau, M. Delyon, F. |
| description | In 2000, Campbell et al. (Nature 404:53,
2000
) have shown that three-dimensional periodic nanostructures can be obtained from UV laser interference irradiation of photoresist for 6 nanosecond single pulse. We have developed a similar experiment for photolytic gas phase decomposition and for photopatternable organic–inorganic hybrid resins.
Different steps in results, presently reported, were first to determine the characteristics of both the 3D interference pattern and interferometer to be associated to a CVD reactor and second to verify the mechanical stability of the set up confirmed with the structuration of a siloxane based methacrylic resins by UV polymerization and finally to grow periodic nanostructures by photolytic gas phase decomposition of chromyl chloride. The experimental results obtained so far indicate that, depending on the electromagnetic energy density, a vapor phase decomposition of chromyl chloride leads to periodic arrays of either Cr–O amorphous or Cr
2
O
3
particles on glass and (001)TiO
2
substrates at room temperature. |
| doi_str_mv | 10.1007/s00339-008-4645-5 |
| format | Article |
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2000
) have shown that three-dimensional periodic nanostructures can be obtained from UV laser interference irradiation of photoresist for 6 nanosecond single pulse. We have developed a similar experiment for photolytic gas phase decomposition and for photopatternable organic–inorganic hybrid resins.
Different steps in results, presently reported, were first to determine the characteristics of both the 3D interference pattern and interferometer to be associated to a CVD reactor and second to verify the mechanical stability of the set up confirmed with the structuration of a siloxane based methacrylic resins by UV polymerization and finally to grow periodic nanostructures by photolytic gas phase decomposition of chromyl chloride. The experimental results obtained so far indicate that, depending on the electromagnetic energy density, a vapor phase decomposition of chromyl chloride leads to periodic arrays of either Cr–O amorphous or Cr
2
O
3
particles on glass and (001)TiO
2
substrates at room temperature.</description><identifier>ISSN: 0947-8396</identifier><identifier>EISSN: 1432-0630</identifier><identifier>DOI: 10.1007/s00339-008-4645-5</identifier><language>eng</language><publisher>Berlin/Heidelberg: Springer-Verlag</publisher><subject>Characterization and Evaluation of Materials ; Chemical Sciences ; Condensed Matter Physics ; Interference ; Lasers ; Machines ; Manufacturing ; Material chemistry ; Nanocomposites ; Nanomaterials ; Nanostructure ; Nanotechnology ; Optical and Electronic Materials ; Photoresists ; Physics ; Physics and Astronomy ; Polymers ; Processes ; Surfaces and Interfaces ; Synthesis ; Thin Films</subject><ispartof>Applied physics. A, Materials science & processing, 2008-10, Vol.93 (1), p.105-110</ispartof><rights>Springer-Verlag 2008</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c355t-3dcbbdbfc425e6900c5627f4550c4fc2e3af5fa2475fff454c4f73de557ba9843</citedby><cites>FETCH-LOGICAL-c355t-3dcbbdbfc425e6900c5627f4550c4fc2e3af5fa2475fff454c4f73de557ba9843</cites><orcidid>0000-0002-1513-9000</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s00339-008-4645-5$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s00339-008-4645-5$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>230,314,780,784,885,27924,27925,41488,42557,51319</link.rule.ids><backlink>$$Uhttps://hal.science/hal-02569529$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Salaün, M.</creatorcontrib><creatorcontrib>Audier, M.</creatorcontrib><creatorcontrib>Duneau, M.</creatorcontrib><creatorcontrib>Delyon, F.</creatorcontrib><title>Synthesis of 3-dimensional periodic nanostructures in an interference field of UV laser light</title><title>Applied physics. A, Materials science & processing</title><addtitle>Appl. Phys. A</addtitle><description>In 2000, Campbell et al. (Nature 404:53,
2000
) have shown that three-dimensional periodic nanostructures can be obtained from UV laser interference irradiation of photoresist for 6 nanosecond single pulse. We have developed a similar experiment for photolytic gas phase decomposition and for photopatternable organic–inorganic hybrid resins.
Different steps in results, presently reported, were first to determine the characteristics of both the 3D interference pattern and interferometer to be associated to a CVD reactor and second to verify the mechanical stability of the set up confirmed with the structuration of a siloxane based methacrylic resins by UV polymerization and finally to grow periodic nanostructures by photolytic gas phase decomposition of chromyl chloride. The experimental results obtained so far indicate that, depending on the electromagnetic energy density, a vapor phase decomposition of chromyl chloride leads to periodic arrays of either Cr–O amorphous or Cr
2
O
3
particles on glass and (001)TiO
2
substrates at room temperature.</description><subject>Characterization and Evaluation of Materials</subject><subject>Chemical Sciences</subject><subject>Condensed Matter Physics</subject><subject>Interference</subject><subject>Lasers</subject><subject>Machines</subject><subject>Manufacturing</subject><subject>Material chemistry</subject><subject>Nanocomposites</subject><subject>Nanomaterials</subject><subject>Nanostructure</subject><subject>Nanotechnology</subject><subject>Optical and Electronic Materials</subject><subject>Photoresists</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Polymers</subject><subject>Processes</subject><subject>Surfaces and Interfaces</subject><subject>Synthesis</subject><subject>Thin Films</subject><issn>0947-8396</issn><issn>1432-0630</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNp9kMtKLDEURYMo2D4-wFmGOoim8qjHUOReW2hw4GMmIZ06sSPVSZtTdcG_N01dHJrBCWzW3oNFyEXFryvOmxvkXMqOcd4yVSvN9AFZVEoKxmvJD8mCd6phrezqY3KC-MHLU0IsyNvTVxw3gAFp8lSyPmwhYkjRDnQHOaQ-OBptTDjmyY1TBqQhUhvLHSF7yBAdUB9g6PcLL690sAiZDuF9M56RI28HhPP__yl5-fvn-W7JVo_3D3e3K-ak1iOTvVuv-7V3SmioO86drkXjldbcKe8ESOu1t0I12vsSq5I2sgetm7XtWiVPydW8u7GD2eWwtfnLJBvM8nZl9hkXuu606P5Vhb2c2V1OnxPgaLYBHQyDjZAmNJVoZd1Wuq0LWs2oywkxg__ZrrjZazezdlO0m712o0tHzB0sbHyHbD7SlItO_KX0DRkehaY</recordid><startdate>20081001</startdate><enddate>20081001</enddate><creator>Salaün, M.</creator><creator>Audier, M.</creator><creator>Duneau, M.</creator><creator>Delyon, F.</creator><general>Springer-Verlag</general><general>Springer Verlag</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>H8D</scope><scope>JG9</scope><scope>L7M</scope><scope>1XC</scope><orcidid>https://orcid.org/0000-0002-1513-9000</orcidid></search><sort><creationdate>20081001</creationdate><title>Synthesis of 3-dimensional periodic nanostructures in an interference field of UV laser light</title><author>Salaün, M. ; Audier, M. ; Duneau, M. ; Delyon, F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c355t-3dcbbdbfc425e6900c5627f4550c4fc2e3af5fa2475fff454c4f73de557ba9843</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Characterization and Evaluation of Materials</topic><topic>Chemical Sciences</topic><topic>Condensed Matter Physics</topic><topic>Interference</topic><topic>Lasers</topic><topic>Machines</topic><topic>Manufacturing</topic><topic>Material chemistry</topic><topic>Nanocomposites</topic><topic>Nanomaterials</topic><topic>Nanostructure</topic><topic>Nanotechnology</topic><topic>Optical and Electronic Materials</topic><topic>Photoresists</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Polymers</topic><topic>Processes</topic><topic>Surfaces and Interfaces</topic><topic>Synthesis</topic><topic>Thin Films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Salaün, M.</creatorcontrib><creatorcontrib>Audier, M.</creatorcontrib><creatorcontrib>Duneau, M.</creatorcontrib><creatorcontrib>Delyon, F.</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Hyper Article en Ligne (HAL)</collection><jtitle>Applied physics. A, Materials science & processing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Salaün, M.</au><au>Audier, M.</au><au>Duneau, M.</au><au>Delyon, F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Synthesis of 3-dimensional periodic nanostructures in an interference field of UV laser light</atitle><jtitle>Applied physics. A, Materials science & processing</jtitle><stitle>Appl. Phys. A</stitle><date>2008-10-01</date><risdate>2008</risdate><volume>93</volume><issue>1</issue><spage>105</spage><epage>110</epage><pages>105-110</pages><issn>0947-8396</issn><eissn>1432-0630</eissn><abstract>In 2000, Campbell et al. (Nature 404:53,
2000
) have shown that three-dimensional periodic nanostructures can be obtained from UV laser interference irradiation of photoresist for 6 nanosecond single pulse. We have developed a similar experiment for photolytic gas phase decomposition and for photopatternable organic–inorganic hybrid resins.
Different steps in results, presently reported, were first to determine the characteristics of both the 3D interference pattern and interferometer to be associated to a CVD reactor and second to verify the mechanical stability of the set up confirmed with the structuration of a siloxane based methacrylic resins by UV polymerization and finally to grow periodic nanostructures by photolytic gas phase decomposition of chromyl chloride. The experimental results obtained so far indicate that, depending on the electromagnetic energy density, a vapor phase decomposition of chromyl chloride leads to periodic arrays of either Cr–O amorphous or Cr
2
O
3
particles on glass and (001)TiO
2
substrates at room temperature.</abstract><cop>Berlin/Heidelberg</cop><pub>Springer-Verlag</pub><doi>10.1007/s00339-008-4645-5</doi><tpages>6</tpages><orcidid>https://orcid.org/0000-0002-1513-9000</orcidid></addata></record> |
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| ispartof | Applied physics. A, Materials science & processing, 2008-10, Vol.93 (1), p.105-110 |
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| language | eng |
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| subjects | Characterization and Evaluation of Materials Chemical Sciences Condensed Matter Physics Interference Lasers Machines Manufacturing Material chemistry Nanocomposites Nanomaterials Nanostructure Nanotechnology Optical and Electronic Materials Photoresists Physics Physics and Astronomy Polymers Processes Surfaces and Interfaces Synthesis Thin Films |
| title | Synthesis of 3-dimensional periodic nanostructures in an interference field of UV laser light |
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