Nonlinear operation of resonant sensors based on weakly-coupled resonators: Experimental investigation of an actively-coupled architecture

[Display omitted] •Sensitivity to stiffness variation, to drive level and to noise of nonlinear WCRs is experimentally investigated.•Study is based on MEMS mutually injection-locked oscillator, with nonlinear restoring and damping forces.•Parametric sensitivity of amplitude ratio R and phase differe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Sensors and actuators. A. Physical. 2019-10, Vol.297, p.111504, Article 111504
Hauptverfasser:	Juillard, Jérôme, Mostafa, Ali, Maris Ferreira, Pietro
Format:	Artikel
Sprache:	eng
Schlagworte:	Bandwidths Damping Electronics Engineering Sciences Micro and nanotechnologies Microelectromechanical systems Microelectronics Nonlinear oscillations Parameter sensitivity Resonant sensors Resonators Sensors Weakly-coupled resonators
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!