Optimizing an electrochemical deposition process by use of design of computer experiments

A response surface methodology only based in this case on computer experiments was used in conjunction with the desirability concept to optimize a priori an electrodeposition process designed for production of gold-tin alloy bumps on a 4 inches wafer. The efficiency of the method was used to achieve...

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Veröffentlicht in:	Analusis 1998-10, Vol.26 (8), p.281-283
Hauptverfasser:	Rabiot, D., Caire, J.-P., Nguyen, B., Chainet, E., Gerard, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical engineering Chemical Sciences
Online-Zugang:	Volltext
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