Giant, Anomalous Piezoimpedance in Silicon-on-insulator

A giant, anomalous piezoresponse of fully depleted silicon-on-insulator devices under mechanical stress is demonstrated by impedance spectroscopy. This piezoresponse strongly depends on the measurement frequency, ω, and consists of both a piezoresistance (PZR) and a piezocapacitance, whose maximum v...

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Veröffentlicht in:	Physical review applied 2019-04, Vol.11 (4), Article 044010
Hauptverfasser:	Li, H., Lew, C.T.K., Johnson, B.C., McCallum, J.C., Arscott, S., Rowe, A.C.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed Matter Engineering Sciences Micro and nanotechnologies Microelectronics Physics
Online-Zugang:	Volltext
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