Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition

Reactive magnetron sputtering was used to deposit titanium oxycarbide thin films. The overall set of results showed that the oxygen flow rate, and thus the composition of the atmosphere in the deposition chamber, controls the composition of the titanium oxycarbide thin films obtained by reactive spu...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Surface & coatings technology 2012-01, Vol.206 (8), p.2525-2534
Hauptverfasser:	Chappé, J.M., Fernandes, A.C., Moura, C., Alves, E., Barradas, N.P., Martin, N., Espinós, J.P., Vaz, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Carbides Cross-disciplinary physics: materials science rheology Electrical conductivity Engineering Sciences Evolution Exact sciences and technology Materials Materials science Micro and nanotechnologies Microelectronics Optical properties Oxycarbides Physics Semiconductors Surface layer Surface treatments Texture Thin films Titanium X-ray photoelectron spectroscopy (XPS) X-rays
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!