Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process
DLC based coatings are now widely used for many applications. Me-doped DLC (Me = Metal) are studied intensively in order to optimize properties such as low compressive stress, low friction coefficient and higher tribological performance. These Me-DLC coatings are often deposited by means of a PVD/PE...
Gespeichert in:
| Veröffentlicht in: | Surface & coatings technology 2018-11, Vol.354, p.351-359 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!