Microstructural and tribological characterization of MoSx coatings produced by high-energy ion-beam-assisted deposition

Thin (0.1-1 μm) MoSx (x = 1.2) films were deposited onto 440C steel by ion beam sputtering of an MoS2 target with (or without) high-energy (160 keV) Ar+ ion beam assistance. The coatings were analyses for microstructure by transmission electron microscopy and grazing incidence X-ray diffraction and...

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Veröffentlicht in:	Thin solid films 1993-02, Vol.224 (1), p.52-57
Hauptverfasser:	Grosseau-Poussard, J.L., Moine, P., Villain, J.P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences Mechanics Mechanics of materials Physics
Online-Zugang:	Volltext
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