Squeeze film damping and stiffening in circular CMUT with air-filled cavity: Influence of the lateral venting boundary conditions and the bias voltage

•The sealed air-filled cavity increases bandwidth of air-coupled CMUT.•For high squeeze number region, squeeze film effects do not depend on the lateral venting boundary conditions.•The analytical equation for the stiffness of non-uniform air-filled cavity is determined.•The stiffness ratio of 2 mak...

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