Fine control of critical dimension for the fabrication of large bandgap high frequency photonic and phononic crystals

In this work artificial crystal structures designed to exhibit large and simultaneous photonic and phononic bandgaps, known as phoXonic crystals, are fabricated in silicon. Simulations have shown that honeycomb and square symmetry phoXonic crystals with high filling-fractions can produce large bandg...

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Veröffentlicht in:	Microelectronic engineering 2011-08, Vol.88 (8), p.2233-2235
Hauptverfasser:	Cuffe, J., Dudek, D., Kehagias, N., Chapuis, P.-O., Reboud, V., Alsina, F., McInerney, J.G., Sotomayor Torres, C.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Condensed matter: structure, mechanical and thermal properties Crystal structure Crystals Dispersions Electric, optical and optoelectronic circuits Electron beam lithography Electronics Engineering Sciences Exact sciences and technology Honeycomb Integrated optics. Optical fibers and wave guides Materials Mechanics Microelectronic fabrication (materials and surfaces technology) Optical and optoelectronic circuits Oxidation Phononic crystal Photonic crystal Photonics PhoXonic crystal Physics Reactive ion etching Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Structure of solids and liquids crystallography Structure of specific crystalline solids Thermics
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