Elastic reflection of electrons by porous silicon layered (PSL) surfaces: effects of porosity

The electrical and optical properties of porous silicon layers deposited on silicon substrates are determined by their electrochemical preparation conditions. Porous silicon layers (PSL) deposited on low resistivity (10 −3 ω cm) boron doped p + Si exhibits channel structure, whereas layers formed on...

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Veröffentlicht in:	Applied surface science 1997-06, Vol.115 (2), p.111-115
Hauptverfasser:	Robert, C., Bideux, L., Gruzza, B., Vazsonyi, E., Gergely, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed Matter Condensed matter: structure, mechanical and thermal properties Engineering Sciences Exact sciences and technology Materials Science Micro and nanotechnologies Microelectronics Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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