Amorphous Ge‐Sb‐Se thin films fabricated by co‐sputtering: Properties and photosensitivity

Amorphous Ge–Sb–Se thin films were fabricated by a rf‐magnetron co‐sputtering technique employing the following cathodes: GeSe2, Sb2Se3, and Ge28Sb12Se60. The influence of the composition, determined by energy‐dispersive X‐ray spectroscopy, on the optical properties was studied. Optical properties w...

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Veröffentlicht in:	Journal of the American Ceramic Society 2018-07, Vol.101 (7), p.2877-2887
Hauptverfasser:	Halenkovič, Tomáš, Gutwirth, Jan, Němec, Petr, Baudet, Emeline, Specht, Marion, Gueguen, Yann, Sangleboeuf, Jean‐Christophe, Nazabal, Virginie
Format:	Artikel
Sprache:	eng
Schlagworte:	amorphous chalcogenides Antimony Atomic force microscopy Atomic structure Cathode sputtering Chemical Sciences Energy dispersive X ray spectroscopy magnetron sputtering Material chemistry optical materials/properties Optical properties Photosensitivity Physics Raman spectra Refractivity Scanning electron microscopy Selenium Spectroellipsometry Spectrophotometry Spectrum analysis Sputtered films Thin films
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