Optimization of an MEMS Magnetic Thin Film Vibrating Magnetometer
This paper presents models developed through analytical or numerical computation and finite-element analysis to improve the resolution of a new kind of vibrating magnetometers. This peculiar magnetometer uses the piezoelectric transduction to actuate a quartz resonator at its resonance frequency tak...
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| Veröffentlicht in: | IEEE transactions on magnetics 2017-04, Vol.53 (4), p.1-5 |
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| container_title | IEEE transactions on magnetics |
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| creator | Perrier, T. Levy, R. Bourgeteau-Verlhac, B. Kayser, P. Moulin, J. Paquay, S. |
| description | This paper presents models developed through analytical or numerical computation and finite-element analysis to improve the resolution of a new kind of vibrating magnetometers. This peculiar magnetometer uses the piezoelectric transduction to actuate a quartz resonator at its resonance frequency taking advantage of the high Q factor of a quartz resonator to achieve high resolution. The magnetic sensitive element is a thin ferromagnetic film of nickel-cobalt, which is sputtered on the moving beams of the resonator. This magnetic thin film applies a periodic torque on the resonator, shifting its resonance frequency. This torque depends on the magnetic field applied; therefore, the value of the magnetic field can be deduced from the frequency shift measurement. The aim of this paper is to develop and improve sensitivity models, which will be useful tools in the future work to establish the optimal geometry for a resonator and the best position of the magnetic thin film on it in order to improve the sensitivity and resolution of the global sensor. |
| doi_str_mv | 10.1109/TMAG.2016.2622480 |
| format | Article |
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This peculiar magnetometer uses the piezoelectric transduction to actuate a quartz resonator at its resonance frequency taking advantage of the high Q factor of a quartz resonator to achieve high resolution. The magnetic sensitive element is a thin ferromagnetic film of nickel-cobalt, which is sputtered on the moving beams of the resonator. This magnetic thin film applies a periodic torque on the resonator, shifting its resonance frequency. This torque depends on the magnetic field applied; therefore, the value of the magnetic field can be deduced from the frequency shift measurement. The aim of this paper is to develop and improve sensitivity models, which will be useful tools in the future work to establish the optimal geometry for a resonator and the best position of the magnetic thin film on it in order to improve the sensitivity and resolution of the global sensor.</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/TMAG.2016.2622480</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Ferromagnetic thin film ; Finite element analysis ; Instrumentation and Detectors ; Magnetic fields ; Magnetic films ; Magnetic resonance ; Magnetism ; magnetometer ; Magnetometers ; Magnetostatics ; micro-electromechanical systems (MEMS) ; Physics ; Quartz ; quartz resonator ; Resonators ; Sensitivity ; sensitivity modeling ; Thin films</subject><ispartof>IEEE transactions on magnetics, 2017-04, Vol.53 (4), p.1-5</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2017</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c370t-77dea44a453f69d4766a00a2c3495e5d22d74736f54fc82259dcb74a0bfd7f0d3</citedby><cites>FETCH-LOGICAL-c370t-77dea44a453f69d4766a00a2c3495e5d22d74736f54fc82259dcb74a0bfd7f0d3</cites><orcidid>0000-0001-6640-2000</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/7725949$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>230,314,780,784,796,885,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/7725949$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttps://hal.science/hal-01743409$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Perrier, T.</creatorcontrib><creatorcontrib>Levy, R.</creatorcontrib><creatorcontrib>Bourgeteau-Verlhac, B.</creatorcontrib><creatorcontrib>Kayser, P.</creatorcontrib><creatorcontrib>Moulin, J.</creatorcontrib><creatorcontrib>Paquay, S.</creatorcontrib><title>Optimization of an MEMS Magnetic Thin Film Vibrating Magnetometer</title><title>IEEE transactions on magnetics</title><addtitle>TMAG</addtitle><description>This paper presents models developed through analytical or numerical computation and finite-element analysis to improve the resolution of a new kind of vibrating magnetometers. This peculiar magnetometer uses the piezoelectric transduction to actuate a quartz resonator at its resonance frequency taking advantage of the high Q factor of a quartz resonator to achieve high resolution. The magnetic sensitive element is a thin ferromagnetic film of nickel-cobalt, which is sputtered on the moving beams of the resonator. This magnetic thin film applies a periodic torque on the resonator, shifting its resonance frequency. This torque depends on the magnetic field applied; therefore, the value of the magnetic field can be deduced from the frequency shift measurement. The aim of this paper is to develop and improve sensitivity models, which will be useful tools in the future work to establish the optimal geometry for a resonator and the best position of the magnetic thin film on it in order to improve the sensitivity and resolution of the global sensor.</description><subject>Ferromagnetic thin film</subject><subject>Finite element analysis</subject><subject>Instrumentation and Detectors</subject><subject>Magnetic fields</subject><subject>Magnetic films</subject><subject>Magnetic resonance</subject><subject>Magnetism</subject><subject>magnetometer</subject><subject>Magnetometers</subject><subject>Magnetostatics</subject><subject>micro-electromechanical systems (MEMS)</subject><subject>Physics</subject><subject>Quartz</subject><subject>quartz resonator</subject><subject>Resonators</subject><subject>Sensitivity</subject><subject>sensitivity modeling</subject><subject>Thin films</subject><issn>0018-9464</issn><issn>1941-0069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kEFLw0AQhRdRsFZ_gHgJePKQOrs72c0eQ7Gt0NCD1euyTTbtliapm1TQX29CSk_DzHzv8XiEPFKYUArqdZ0m8wkDKiZMMIYxXJERVUhDAKGuyQiAxqFCgbfkrmn23YoRhRFJVsfWle7PtK6ugroITBWkb-lHkJptZVuXBeudq4KZO5TBl9v4jqu252dd2tb6e3JTmENjH85zTD5nb-vpIlyu5u_TZBlmXEIbSplbg2gw4oVQOUohDIBhGUcV2ShnLJcouSgiLLKYsUjl2UaigU2RywJyPiYvg-_OHPTRu9L4X10bpxfJUvc3oBI5gvqhHfs8sEdff59s0-p9ffJVF0_TOAaqOETQUXSgMl83jbfFxZaC7lvVfau6b1WfW-00T4PGWWsvvJRdXlT8H4xZcK0</recordid><startdate>20170401</startdate><enddate>20170401</enddate><creator>Perrier, T.</creator><creator>Levy, R.</creator><creator>Bourgeteau-Verlhac, B.</creator><creator>Kayser, P.</creator><creator>Moulin, J.</creator><creator>Paquay, S.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><general>Institute of Electrical and Electronics Engineers</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><scope>1XC</scope><scope>VOOES</scope><orcidid>https://orcid.org/0000-0001-6640-2000</orcidid></search><sort><creationdate>20170401</creationdate><title>Optimization of an MEMS Magnetic Thin Film Vibrating Magnetometer</title><author>Perrier, T. ; Levy, R. ; Bourgeteau-Verlhac, B. ; Kayser, P. ; Moulin, J. ; Paquay, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c370t-77dea44a453f69d4766a00a2c3495e5d22d74736f54fc82259dcb74a0bfd7f0d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Ferromagnetic thin film</topic><topic>Finite element analysis</topic><topic>Instrumentation and Detectors</topic><topic>Magnetic fields</topic><topic>Magnetic films</topic><topic>Magnetic resonance</topic><topic>Magnetism</topic><topic>magnetometer</topic><topic>Magnetometers</topic><topic>Magnetostatics</topic><topic>micro-electromechanical systems (MEMS)</topic><topic>Physics</topic><topic>Quartz</topic><topic>quartz resonator</topic><topic>Resonators</topic><topic>Sensitivity</topic><topic>sensitivity modeling</topic><topic>Thin films</topic><toplevel>online_resources</toplevel><creatorcontrib>Perrier, T.</creatorcontrib><creatorcontrib>Levy, R.</creatorcontrib><creatorcontrib>Bourgeteau-Verlhac, B.</creatorcontrib><creatorcontrib>Kayser, P.</creatorcontrib><creatorcontrib>Moulin, J.</creatorcontrib><creatorcontrib>Paquay, S.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>IEEE transactions on magnetics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Perrier, T.</au><au>Levy, R.</au><au>Bourgeteau-Verlhac, B.</au><au>Kayser, P.</au><au>Moulin, J.</au><au>Paquay, S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optimization of an MEMS Magnetic Thin Film Vibrating Magnetometer</atitle><jtitle>IEEE transactions on magnetics</jtitle><stitle>TMAG</stitle><date>2017-04-01</date><risdate>2017</risdate><volume>53</volume><issue>4</issue><spage>1</spage><epage>5</epage><pages>1-5</pages><issn>0018-9464</issn><eissn>1941-0069</eissn><coden>IEMGAQ</coden><abstract>This paper presents models developed through analytical or numerical computation and finite-element analysis to improve the resolution of a new kind of vibrating magnetometers. This peculiar magnetometer uses the piezoelectric transduction to actuate a quartz resonator at its resonance frequency taking advantage of the high Q factor of a quartz resonator to achieve high resolution. The magnetic sensitive element is a thin ferromagnetic film of nickel-cobalt, which is sputtered on the moving beams of the resonator. This magnetic thin film applies a periodic torque on the resonator, shifting its resonance frequency. This torque depends on the magnetic field applied; therefore, the value of the magnetic field can be deduced from the frequency shift measurement. 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| subjects | Ferromagnetic thin film Finite element analysis Instrumentation and Detectors Magnetic fields Magnetic films Magnetic resonance Magnetism magnetometer Magnetometers Magnetostatics micro-electromechanical systems (MEMS) Physics Quartz quartz resonator Resonators Sensitivity sensitivity modeling Thin films |
| title | Optimization of an MEMS Magnetic Thin Film Vibrating Magnetometer |
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