III-V-on-silicon integrated micro - spectrometer for the 3 μm wavelength range

A compact (1.2 mm ) fully integrated mid-IR spectrometer operating in the 3 μm wavelength range is presented. To our knowledge this is the longest wavelength integrated spectrometer operating in the important wavelength window for spectroscopy of organic compounds. The spectrometer is based on a sil...

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Veröffentlicht in:	Optics express 2016-05, Vol.24 (9), p.9465-9472
Hauptverfasser:	Muneeb, M, Vasiliev, A, Ruocco, A, Malik, A, Chen, H, Nedeljkovic, M, Penades, J S, Cerutti, L, Rodriguez, J B, Mashanovich, G Z, Smit, M K, Tourni, E, Roelkens, G
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Schlagworte:	Electronics Engineering Sciences
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creator	Muneeb, M Vasiliev, A Ruocco, A Malik, A Chen, H Nedeljkovic, M Penades, J S Cerutti, L Rodriguez, J B Mashanovich, G Z Smit, M K Tourni, E Roelkens, G
description	A compact (1.2 mm ) fully integrated mid-IR spectrometer operating in the 3 μm wavelength range is presented. To our knowledge this is the longest wavelength integrated spectrometer operating in the important wavelength window for spectroscopy of organic compounds. The spectrometer is based on a silicon-on-insulator arrayed waveguide grating filter. An array of InAs Sb p-i-n photodiodes is heterogeneously integrated on the spectrometers output grating couplers using adhesive bonding. The spectrometer insertion loss is less than 3 dB and the waveguide-referred responsivity of the integrated photodiodes at room temperature is 0.3 A/W.
doi_str_mv	10.1364/OE.24.009465
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title	III-V-on-silicon integrated micro - spectrometer for the 3 μm wavelength range
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