Four different approaches for the measurement of IC surface temperature: application to thermal testing

Silicon die surface temperature can be used to monitor the health state of digital and analogue integrated circuits (IC). In the present paper, four different sensing techniques: scanning thermal microscope, laser reflectometer, laser interferometer and electronic built-in differential temperature s...

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Veröffentlicht in:	Microelectronics 2002-09, Vol.33 (9), p.689-696
Hauptverfasser:	Altet, Josep, Dilhaire, Stefan, Volz, Sebastian, Rampnoux, Jean-Michel, Rubio, Antonio, Grauby, Stephane, Patino Lopez, Luis David, Claeys, Wilfrid, Saulnier, Jean-Bernard
Format:	Artikel
Sprache:	eng
Schlagworte:	Built-in temperature sensors Integrated circuits Laser interferometry Laser reflectometry Physics Scanning thermal microscopy Thermal couplings Thermal testing
Online-Zugang:	Volltext
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