Hybrid global model of water cluster ions in atmospheric pressure Ar/ H2O RF capacitive discharges

Water is a trace gas of strong interest for plasma-based medical applications. We use a hybrid global model to simulate a chemically complex Ar/H2O atmospheric pressure, radio frequency capacitive discharge, including 47 species with positive ion clusters up to H21O10+. For a discharge gap of 1.5 mm...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2016-10, Vol.49 (46)
Hauptverfasser:	Tavant, A, Lieberman, M A
Format:	Artikel
Sprache:	eng
Schlagworte:	argon water H atmospheric pressure rf discharge simulation O discharge simulation Physics Plasma Physics positive ion water cluster dynamics
Online-Zugang:	Volltext
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