Atomic scale structure of amorphous aluminum oxyhydroxide, oxide and oxycarbide films probed by very high field 27Al nuclear magnetic resonance

The atomic scale structure of aluminum in amorphous alumina films processed by direct liquid injection chemical vapor deposition from aluminum tri-isopropoxide (ATI) and dimethyl isopropoxide (DMAI) is investigated by solid-state 27Al nuclear magnetic resonance (SSNMR) using a very high magnetic fie...

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Veröffentlicht in:	Physical chemistry chemical physics : PCCP 2017-03, Vol.19 (11), p.8101-8110
Hauptverfasser:	Baggetto, L, Sarou-Kanian, V, Florian, P, Gleizes, A N, Massiot, D, Vahlas, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical Sciences Engineering Sciences Material chemistry Materials
Online-Zugang:	Volltext
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