Raman spectroscopy of Si nanoparticles embedded in silica films

The formation of crystalline silicon nanoparticles was investigated by means of Raman spectroscopy. SiOx (x = 1 and x = 1.5) films deposited by electron-gun evaporation onto silica substrates were submitted to post-deposition thermal treatments at 1000 and 1100 °C for various times. From lineshape a...

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Veröffentlicht in:European physical journal. Applied physics 2008-10, Vol.44 (1), p.51-57
Hauptverfasser: Stenger, I., Gallas, B., Jusserand, B., Chenot, S., Fisson, S., Rivory, J.
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container_issue 1
container_start_page 51
container_title European physical journal. Applied physics
container_volume 44
creator Stenger, I.
Gallas, B.
Jusserand, B.
Chenot, S.
Fisson, S.
Rivory, J.
description The formation of crystalline silicon nanoparticles was investigated by means of Raman spectroscopy. SiOx (x = 1 and x = 1.5) films deposited by electron-gun evaporation onto silica substrates were submitted to post-deposition thermal treatments at 1000 and 1100 °C for various times. From lineshape analysis of the Raman band, it appeared that the crystalline volume fraction never excessed 30% for annealing at 1000 °C, while the mean diameter remained almost constant. Complete crystallisation was achieved after annealing at 1100 °C, accompanied by an increase of the nanoparticle size. Mean diameters of the nanoparticles obtained from Raman spectra analysis along the two main confinement models, Richter et al., Campbell, Fauchet model and bond-polarizability model, were discussed and compared to values deduced from transmission electron microscopy measurements.
doi_str_mv 10.1051/epjap:2008140
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subjects 61.46.Hk
63.22.Kn
78.30.Am
Condensed Matter
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Elemental semiconductors and insulators
Exact sciences and technology
Infrared and raman spectra and scattering
Lattice dynamics
Nanocrystals and nanoparticles
Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures
Phonons in low-dimensional structures and small particles
Physics
Structure of solids and liquids
crystallography
title Raman spectroscopy of Si nanoparticles embedded in silica films
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