Symmetric and Compact Single-Pole Multiple-Throw (SP7T, SP11T) RF MEMS Switches

This paper presents extremely compact single-pole multiple-throw radio frequency (RF) microelectromechanical system switches, SP7T and SP11T, based on a symmetric circular switch topology. The switch dimensions are 0.61 mm ×0.61 mm, which is smaller than typical CMOS Si-on-insulator switches. The SP...

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Veröffentlicht in:Journal of microelectromechanical systems 2015-06, Vol.24 (3), p.685-695
Hauptverfasser: Hyun-Ho Yang, Yahiaoui, Achref, Zareie, Hosein, Blondy, Pierre, Rebeiz, Gabriel M.
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Sprache:eng
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Zusammenfassung:This paper presents extremely compact single-pole multiple-throw radio frequency (RF) microelectromechanical system switches, SP7T and SP11T, based on a symmetric circular switch topology. The switch dimensions are 0.61 mm ×0.61 mm, which is smaller than typical CMOS Si-on-insulator switches. The SP7T and SP11T switches, which are insensitive to stress gradient effects, achieve simulated contact and restoring forces of 0.3-0.4 mN (per a switch) at 90-100 V. The SP7T and SP11T switches also achieve isolation levels of 50-19 dB and 50-17 dB, respectively, and insertion loss of 0.3-1.2 dB and 0.3-1.7 dB, respectively, at 0.1-10 GHz. The measured ON-resistance is 4.5-2.5 Ω at 75-100 V, respectively, in an open environment and limited by contact contamination. The measured switching time is 7-10 μs. Cold-switched reliability tests of SP7T and SP11T switches show greater than 10 8 Hz with an RF power of 0.1-1 W, which is sufficient power handling capability for 3G and 4G systems.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2014.2344694