Laser-based micro/nanofabrication in one, two and three dimensions

Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanica...

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Veröffentlicht in:	Frontiers of Optoelectronics (Online) 2015-12, Vol.8 (4), p.351-378
Hauptverfasser:	XIONG, Wei, ZHOU, Yunshen, HOU, Wenjia, JIANG, Lijia, MAHJOURI-SAMANI, Masoud, PARK, Jongbok, HE, Xiangnan, GAO, Yang, FAN, Lisha, BALDACCHINI, Tommaso, SILVAIN, Jean-Francois, LU, Yongfeng
Format:	Artikel
Sprache:	eng
Schlagworte:	Biomedical Engineering and Bioengineering carbon nanotubes (CNTs) Chemical Sciences Electrical Engineering Engineering Engineering Sciences graphene laser material interaction Material chemistry Micro and nanotechnologies micro/nanofabrication Microelectronics multi-photon ablation (MPA) Physics Review Article two-photon polymerization (TPP) 一维纳米材料制造方法化学气相沉积微纳加工激光技术纳机电系统纳米加工技术纳米结构
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