Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips

Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC–CDC) film, followed by the deposition of two types of current collectors (Ti/...

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Veröffentlicht in:	Journal of power sources 2013-03, Vol.225, p.240-244
Hauptverfasser:	Huang, Peihua, Heon, Min, Pech, David, Brunet, Magali, Taberna, Pierre-Louis, Gogotsi, Yury, Lofland, Samuel, Hettinger, Jeffrey D., Simon, Patrice
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Capacitors. Resistors. Filters Carbide derived carbon Chemical Sciences Electrical engineering. Electrical power engineering Electrochemical capacitor Engineering Sciences Exact sciences and technology Material chemistry Materials MEMS Micro-supercapacitors Various equipment and components
Online-Zugang:	Volltext
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