Analysis of an ESD failure mechanism on a SiC MESFET

Efficient energy management become more and more crucial with increasing energy resource scarcity. Power electronic will play a major role in this field and thus require innovations like using wide band gap semiconductor to build power devices. SiC, GaN, diamond material-based devices are currently...

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Veröffentlicht in:Microelectronics and reliability 2014-09, Vol.54 (9-10), p.2217-2221
Hauptverfasser: Phulpin, T., Trémouilles, D., Isoird, K., Tournier, D., Godignon, P., Austin, P.
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container_end_page 2221
container_issue 9-10
container_start_page 2217
container_title Microelectronics and reliability
container_volume 54
creator Phulpin, T.
Trémouilles, D.
Isoird, K.
Tournier, D.
Godignon, P.
Austin, P.
description Efficient energy management become more and more crucial with increasing energy resource scarcity. Power electronic will play a major role in this field and thus require innovations like using wide band gap semiconductor to build power devices. SiC, GaN, diamond material-based devices are currently more or less mature and will sooner or later require investigations on their reliability to allow their wide adoption. In this work we investigate on the robustness of a SiC-MESFET to ElectroStatic-Discharge (ESD). Surprisingly the ESD robustness is rather low and found to be related to both current non-uniformity and a quite unexpected parasitic NPN bipolar transistor triggering. The outcome of this study allows proposing first guidelines to optimize ESD robustness of such devices.
doi_str_mv 10.1016/j.microrel.2014.07.134
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ispartof Microelectronics and reliability, 2014-09, Vol.54 (9-10), p.2217-2221
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source Elsevier ScienceDirect Journals
subjects Applied sciences
Electrical engineering. Electrical power engineering
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Engineering Sciences
ESD
Exact sciences and technology
HBM robustness
Parasitic transistor
Power electronics, power supplies
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
SiC MESFET
TCAD simulation
TLP stress
Transistors
title Analysis of an ESD failure mechanism on a SiC MESFET
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