Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Cr/CrN/CrAlN, CrN/CrAlN and Cr/CrN thin layers were deposited by PVD (Physical Vapor Deposition). The multilayers were obtained from the combined deposition of different layers Cr, CrN and CrAlN thick films on on AISI4140 steel and silicon substrates at 200°C, and evaluated with respect to fundament...

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Veröffentlicht in:	Vacuum 2012-02, Vol.86 (8), p.1048-1056
Hauptverfasser:	Tlili, B., Nouveau, C., Walock, M.J., Nasri, M., Ghrib, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chromium Chromium molybdenum steels Chromium nitride Coatings Engineering Sciences High strength steels Materials Mechanics Multilayers Multilayers Cr/CrN/CrAlN Nanostructure Physical vapor deposition Physics PVD Thermal conductivity Thermal properties Thermics Thin films
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