Nanodevices for correlated electrical transport and structural investigation of individual carbon nanotubes

We report a new approach to the correlation of the structural properties and the transport properties of carbon nanotubes. Through an original combination of UV lithography, custom-made photosensitive sol–gel resist and deep reactive ion etching (RIE), we have successfully integrated membrane techno...

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Veröffentlicht in:	Microelectronic engineering 2004-06, Vol.73, p.689-694
Hauptverfasser:	Sagnes, M., Broto, J-M., Raquet, B., Vieu, C., Conedera, V., Dubreuil, P., Ondarçuhu, T., Laurent, Ch, Flahaut, E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon nanotubes Engineering Sciences High resolution transmission electron microscopy Micro and nanotechnologies Micro-membranes Microelectronics Molecular combing Nanofabrication Sol–gel
Online-Zugang:	Volltext
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