An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements
We report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference oc...
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| Veröffentlicht in: | Review of scientific instruments 2013-12, Vol.84 (12), p.123705-123705 |
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| container_end_page | 123705 |
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| container_issue | 12 |
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| container_title | Review of scientific instruments |
| container_volume | 84 |
| creator | Dargent, T Haddadi, K Lasri, T Clément, N Ducatteau, D Legrand, B Tanbakuchi, H Theron, D |
| description | We report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference occurs. A vectorial calibration method based on a modified 1-port error model is also proposed. Calibrated measurements of capacitors have been obtained around the test frequency of 3.5 GHz down to about 0.1 fF. Comparison with standard vector network analyzer measurements is shown to assess the performance of the proposed system. |
| doi_str_mv | 10.1063/1.4848995 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0034-6748 |
| ispartof | Review of scientific instruments, 2013-12, Vol.84 (12), p.123705-123705 |
| issn | 0034-6748 1089-7623 |
| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | Analyzers Calibration Engineering Sciences Error analysis Instrumentation and Detectors Interference Interferometry Mathematical analysis Micro and nanotechnologies Microelectronics Microscopy Microwaves Network analysers Optics Physics Scanning Scientific apparatus & instruments |
| title | An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements |
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