Thermodynamics of nucleation in an internal oxide getter in silicon

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Veröffentlicht in:	Soviet Physics Journal 1988-08, Vol.31 (8), p.627-631
Hauptverfasser:	Pekarev, A. I., Panasenkova, M. I., Burmistrov, A. N., Bulkin, P. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Engineering Sciences
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language	eng
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source	SpringerNature Journals
subjects	Engineering Sciences
title	Thermodynamics of nucleation in an internal oxide getter in silicon
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