Fabrication of silicon nanostructures using metal-assisted etching in NaBF4

In this report, we demonstrate that sodium tetrafluoroborate (NaBF4) and silver nitrate (AgNO3) aqueous solution can be successfully used as wet etchant to produce silicon nanostructured layers with anti‐reflective properties. The morphology of the resulting nanostructures was studied as a function...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2013-10, Vol.210 (10), p.2178-2182
Hauptverfasser:	Nguyen, Nhung T. P., Coffinier, Yannick, Thomy, Vincent, Boukherroub, Rabah
Format:	Artikel
Sprache:	eng
Schlagworte:	Aqueous solutions metal-assisted etching nanostructures Scanning electron microscopy silicon sodium tetrafluoroborate
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!