Characterizations of CrN/a-CNx nanolayered coatings deposited by DC reactive magnetron sputtering of Cr and graphite targets

CrN/a-CNx nanolayered coatings have been deposited by DC reactive magnetron sputtering of pure Cr and graphite targets. The total thickness is 1 μm and that of a-CNx layers is kept constant at 3.5 nm. The period (bilayer thickness) is in the range 8-16 nm. CrN and a-CNx layers are crystalline and am...

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Veröffentlicht in:	Vacuum 2011-09, Vol.86 (2), p.206-209
Hauptverfasser:	Briois, P., Mercs, D., Demange, V., Banakh, O., Sanchette, F., Billard, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical Sciences Material chemistry
Online-Zugang:	Volltext
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