Strain inhomogeneity in copper islands probed by coherent X-ray diffraction

The strain field of individual epitaxial sub-micrometric copper islands is studied using coherent X-ray diffraction and finite element modelling. The strain inhomogeneity in each island is so large that the characteristic features of the island shape tend to disappear in the diffraction pattern, whi...

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Veröffentlicht in:Thin solid films 2013-03, Vol.530, p.120-124
Hauptverfasser: Beutier, G., Verdier, M., Parry, G., Gilles, B., Labat, S., Richard, M.-I., Cornelius, T., Lory, P.-F., Vu Hoang, S., Livet, F., Thomas, O., de Boissieu, M.
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Sprache:eng
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