$Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction$

Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction

The feasibility of metrological characterization of the one-dimensional (1D) holographic gratings, used in the nanoimprint molding tool fabrication step, by spectroscopic Mueller polarimetry in conical diffraction is investigated. The studied samples correspond to two different steps of the replicat...

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Veröffentlicht in:	Optics express 2007-03, Vol.15 (5), p.2033-2046
Hauptverfasser:	Novikova, Tatiana, De Martino, Antonello, Bulkin, Pavel, Nguyen, Quang, Drévillon, Bernard, Popov, Vladimir, Chumakov, Alexander
Format:	Artikel
Sprache:	eng
Schlagworte:	Optics Physics
Online-Zugang:	Volltext
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